The cylinders of NF3 gases should be stored in a cool and ventilated warehouse, which warehouse temperature should not exceed 30 ā. NF3 cylinders should be far away from fire, heat, and prevent direct sunlight, meanwhile should be stored separately with reducing agent, flammable or combustible materials. NF3 gas cylinders should be lightly loaded and unloaded to prevent damage to cylinders and accessories. The transport of NF3 cylinders is transported as dangerous goods. When transporting, fix the NF3 cylinder with a cylinder holder, transport it by road or by container.
In case of Nitrogen Trifluoride leakage, the staff should immediately evacuate the leakage of contaminated areas, and take measures to prevent further leakage of NF3 gas. If staff poisoning, he should be rushed to hospital for treatment. We should deal with as soon as possible to deal with leakage of the leakage site and staff must wear the necessary gas masks, preferably self-contained positive pressure breathing apparatus. Leakage of the scene by the detection of non-hazardous gas before entering the staff, leaked containers must be carefully checked, repaired or properly handled before they can continue to use.
