Carbon Tetrafluoride, CF4 Specialty Gas

CAS NO	75-73-0
UN NO	1982
EINECS NO	200-896-5
Molecular weight	88
Appearance	Colorless, Odorless
Melting point	-184 ℃
Boiling point	-128.1 ℃
Density	3.72 kg/m³
DOT Class	2.2
Label	Non-flammable Gas

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Teflon is a cryogenic refrigerant that is relatively inert under normal conditions, an oxygen displacer, and is also used in various wafer etching processes.

Tetrafluoromethane, also known as carbon tetrafluoride or R-14, is the simplest perfluorocarbon ( CF4 ). As its IUPAC name suggests, tetrafluoromethane is the perfluorinated counterpart of hydrocarbon methane. It can also be classified as haloalkane or halomethane. Tetrafluoromethane is a useful refrigerant, but also a potent greenhouse gas. It has a very high bond strength due to the nature of the carbon-fluorine bond.

Carbon Tetrafluoride Gas Usage

Tetrafluoromethane is sometimes used as a cryogenic refrigerant (R-14). It can be used alone for electronic microfabrication or in combination with oxygen as a plasma etchant for silicon, silicon dioxide and silicon nitride. It is also used in neutron detectors.

Plasma etching process for various integrated circuits

Low temperature refrigerant

99.999% CF4, Electronic Grade

Specification	99.999%
Oxygen + Argon	≤ 1 ppm
Nitrogen	≤ 2 ppm
Hydrogen	≤ 0.3 ppm
Carbon Monoxide	≤ 0.3 ppm
Carbon Dioxide	≤ 0.3 ppm
Sulfur Hexafluoride	≤ 0.3 ppm
THC	≤ 0.3 ppm
Trifluoromethane	≤ 0.3 ppm
OFC	≤ 1 ppm
Moisture	≤ 1 ppm
Acidity as HF	≤ 0.1 ppm